Micro-Electro-Mechanical Systems

 Topics include: Introduction to micro-electro-mechanical systems (MEMS), applications and materials for MEMS, micro-sensors and micro-actuators principles: mechanical, capacitive, electrostatic, electromagnetic and piezoelectric sensing; thin films, shape memory alloys, comb drive actuation & sensing, micro-mechanisms, air-bag sensors, chemical sensors, biomedical industrial applications; Microfabrication methods (VLSI techniques): positive and negative photoresists, bulk & surface micromachining, etching; deposition techniques such as CVD (Chemical Vapor Deposition); metallization techniques, 3D high aspect ratio techniques.

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